OHT (Overhead Hoist Transport) is the foundation of logistics automation systems in 300mm semiconductor FABs.
The OHT system is responsible for transferring FOUPs(Front Opening Unified POD) between process equipment and process equipment and
between process equipment and storage devices during numerous processes.
OHT is a device that transfers front opening unified POD (FOUP) to the wafer transfer container along the rail installed on the ceiling of the
semiconductor factory, between process equipment and between process equipment and storage devices, as indicated by its name.
The OHT system is largely composed of a driveway and vehicle called Rail or Track.
The vehicle is responsible for transporting the wafer storage container along the designated driveway and delivering the process equipment or
storage device and the wafer storage container.
The rail installed on the ceiling of a semiconductor FAB has provides a passage for the carrier to move and is consisted
with turn units, straight units, branch and confluence units and its combinations.
The OHT consists of features similar to self-driving cars.
